These modulators operate at ultrahigh frequencies in the hundred kHz range, and their micromirror-free configuration simplifies the fabrication process and reduces costs compared to micromirror-based modulators. However, these modulators are limited in their optical. This Micro-Electro-Mechanical (MEMS) Grating Modulator, manufactured by our strategic partner Boston Micromachines Corporation, has controllable groove depth which modulates intensity. The operating principle of the GLM is introduced in this paper. 1 Introduction to Grating Light Modulators In Chapter 9 we described the optical properties of mirror arrays and demonstrated that phase modulation is preferable to amplitude modulation for many applica- tions. This grating-assisted Michelson (GAMI) modulator can operate as either an intensity or amplitude. Microelectromechanical system (MEMS) grating modulators enable versatile beam steering functions through the electrostatic actuation of movable ribbons.
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